Standing-wave Effect in Photoresist with and without HMDS
نویسندگان
چکیده
منابع مشابه
Analytical expression for the standing wave intensity in photoresist.
When a thin dielectric film placed between two semi-infinite media is irradiated with monochromatic plane waves, a standing wave is produced in the film. An analytical expression for the standing wave intensity within the film is derived. This expression is then expanded to include the effects of other dielectric films on either side of the film or an inhomogeneous film. Applications of these e...
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An interferometric position sensor was developed using the concept of sampling a standing wave. Interference of a standing wave created in front of a plane mirror can be detected by thin, partly transparent sensors based on amorphous silicon. The optical thickness of the absorption layer is thinner than the wavelength l of the incident light. Detection of minima and maxima of the standing wave ...
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ژورنال
عنوان ژورنال: Journal of Photopolymer Science and Technology
سال: 2008
ISSN: 0914-9244,1349-6336
DOI: 10.2494/photopolymer.21.299